Invention Grant
US09543178B2 Semiconductor wafer stocker apparatus and wafer transferring methods using the same
有权
半导体晶片储片器装置及使用其的晶片转印方法
- Patent Title: Semiconductor wafer stocker apparatus and wafer transferring methods using the same
- Patent Title (中): 半导体晶片储片器装置及使用其的晶片转印方法
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Application No.: US14602584Application Date: 2015-01-22
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Publication No.: US09543178B2Publication Date: 2017-01-10
- Inventor: Hyun-Woo Lee , Chang-Woo Son , Yong-Jun Ahn , Tai-Jo Jeon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2014-0097586 20140730
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/673

Abstract:
A semiconductor wafer stocker apparatus includes a body frame, an inlet port to load a wafer shipping box into the body frame, an outlet port to unload the wafer shipping box from the body frame, an automated transfer robot operable to convey the wafer shipping box between the inlet port and the outlet port, and a shelf module within the body frame. The shelf module includes a shelf plate configured to support the wafer shipping box. The shelf plate includes first, second, and third protruding support pins arranged to align with respective grooves in an underside of the wafer shipping box and orient the wafer shipping box with a door thereof facing away from the body frame. The first and second support pins may be closer to the body frame than the third support pin. Related apparatus and methods of operation are also discussed.
Public/Granted literature
- US20160035607A1 SEMICONDUCTOR WAFER STOCKER APPARATUS AND WAFER TRANSFERRING METHODS USING THE SAME Public/Granted day:2016-02-04
Information query
IPC分类: