Invention Grant
US09543349B2 CMOS image sensors having a transfer gate electrode, and methods of fabricating CMOS image sensors having a transfer gate electrode
有权
具有传输栅电极的CMOS图像传感器,以及制造具有传输栅电极的CMOS图像传感器的方法
- Patent Title: CMOS image sensors having a transfer gate electrode, and methods of fabricating CMOS image sensors having a transfer gate electrode
- Patent Title (中): 具有传输栅电极的CMOS图像传感器,以及制造具有传输栅电极的CMOS图像传感器的方法
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Application No.: US14478374Application Date: 2014-09-05
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Publication No.: US09543349B2Publication Date: 2017-01-10
- Inventor: Young-Sun Oh , Kyung-Ho Lee , Hee-Geun Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2014-0022129 20140225
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Complementary metal-oxide-semiconductor (CMOS) image sensors are provided. A CMOS image sensor includes a substrate including a pixel array and a peripheral circuit region, a photodiode and a floating diffusion region in the pixel array of the substrate, a transfer gate insulating layer and a transfer gate electrode on the substrate between the photodiode and the floating diffusion region, and a peripheral gate insulating layer and a peripheral gate electrode on the peripheral circuit region. The transfer gate electrode includes a first edge that is rounded to have a first radius of curvature, and the peripheral gate electrode includes a second edge that is rounded to have a second radius of curvature smaller than the first radius of curvature.
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