Invention Grant
- Patent Title: Reduced expansion thermal compression bonding process bond head
- Patent Title (中): 减少膨胀热压接工艺粘结头
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Application No.: US14132812Application Date: 2013-12-18
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Publication No.: US09548284B2Publication Date: 2017-01-17
- Inventor: Pramod Malatkar , Hemanth Dhavaleswarapu , James Neeb
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/603 ; B29L31/34

Abstract:
Embodiments of a thermal compression bonding process bond head and a method for producing a thermal compression bonding process bond head are disclosed. In some embodiments, the bond head includes a thermal compression bonding process heater and a cooling block coupled to the heater through an annular structure. The annular structure surrounds a lower portion of the cooling block and couples the cooling block to the heater such that there is no direct mechanical contact between the cooling block and the heater.
Public/Granted literature
- US20150171047A1 REDUCED EXPANSION THERMAL COMPRESSION BONDING PROCESS BOND HEAD Public/Granted day:2015-06-18
Information query
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