Invention Grant
- Patent Title: Structure and formation method of semiconductor device structure
- Patent Title (中): 半导体器件结构的结构和形成方法
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Application No.: US14725555Application Date: 2015-05-29
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Publication No.: US09553090B2Publication Date: 2017-01-24
- Inventor: Che-Cheng Chang , Jui-Ping Chuang , Chen-Hsiang Lu , Wei-Ting Chen , Yu-Cheng Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/092 ; H01L29/66 ; H01L29/423 ; H01L29/06 ; H01L21/8238

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate. The semiconductor device structure also includes a gate stack covering a portion of the fin structure, and the gate stack includes a work function layer and a metal filling over the work function layer. The semiconductor device structure further includes an isolation element over the semiconductor substrate and adjacent to the gate stack. The isolation element is in direct contact with the work function layer and the metal filling.
Public/Granted literature
- US20160351568A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE Public/Granted day:2016-12-01
Information query
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