Invention Grant
- Patent Title: Method of manufacturing nanostructure semiconductor light emitting device
- Patent Title (中): 制造纳米结构半导体发光器件的方法
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Application No.: US14607920Application Date: 2015-01-28
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Publication No.: US09553234B2Publication Date: 2017-01-24
- Inventor: Nam Goo Cha , Ki Hyung Lee , Wan Tae Lim , Geun Woo Ko , Min Wook Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2014-0087228 20140711
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/24 ; H01L33/08 ; H01L33/18 ; F21S8/10 ; H01L33/22 ; F21Y101/00

Abstract:
A method of manufacturing a nanostructure semiconductor light emitting device may includes preparing a mask layer by sequentially forming a first insulating layer and a second insulating layer on a base layer configured of a first conductivity-type semiconductor, forming a plurality of openings penetrating the mask layer, growing a plurality of nanorods in the plurality of openings, removing the second insulating layer, preparing a plurality of nanocores by re-growing the plurality of nanorods, and forming nanoscale light emitting structures by sequentially growing an active layer and a second conductivity-type semiconductor layer on surfaces of the plurality of nanocores. The plurality of openings may respectively include a mold region located in the second insulating layer, and the mold region includes at least one curved portion of which an inclination of a side surface varies according to proximity to the first insulating layer.
Public/Granted literature
- US20160013364A1 METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE Public/Granted day:2016-01-14
Information query
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