Invention Grant
US09555595B2 Multi-laminate hermetic barriers and related structures and methods of hermetic sealing 有权
多层压密封屏障及相关结构及密封方法

Multi-laminate hermetic barriers and related structures and methods of hermetic sealing
Abstract:
A free-standing multi-laminate hermetic sheet includes a first carrier film, a hermetic inorganic thin film formed over the first carrier film, and a second carrier film formed over the hermetic inorganic thin film. A workpiece can be hermetically sealed using the multi-laminate sheet, which can be applied to the workpiece in a step separate from a formation step of either the multi-laminate sheet or the workpiece.
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