发明授权
- 专利标题: Semiconductor device having antenna and method for manufacturing thereof
- 专利标题(中): 具有天线的半导体器件及其制造方法
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申请号: US13468354申请日: 2012-05-10
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公开(公告)号: US09559129B2公开(公告)日: 2017-01-31
- 发明人: Kyosuke Ito , Junya Maruyama , Takuya Tsurume , Shunpei Yamazaki
- 申请人: Kyosuke Ito , Junya Maruyama , Takuya Tsurume , Shunpei Yamazaki
- 申请人地址: JP Kanagawa-ken
- 专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人地址: JP Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office
- 代理商 Eric J. Robinson
- 优先权: JP2004-304856 20041019
- 主分类号: H01L27/13
- IPC分类号: H01L27/13 ; G06K19/077 ; H01Q1/22 ; H01Q7/00 ; H01L27/12
摘要:
The present invention provides an antenna in that the adhesive intensity of a conductive body formed on a base film is increased, and a semiconductor device including the antenna. The invention further provides a semiconductor device with high reliability that is formed by attaching an element formation layer and an antenna, wherein the element formation layer is not damaged due to a structure of the antenna. The semiconductor device includes the element formation layer provided over a substrate and the antenna provided over the element formation layer. The element formation layer and the antenna are electrically connected. The antenna has a base film and a conductive body, wherein at least a part of the conductive body is embedded in the base film. As a method for embedding the conductive body in the base film, a depression is formed in the base film and the conductive body is formed therein.
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