Invention Grant
- Patent Title: Silicided nanowires for nanobridge weak links
- Patent Title (中): 纳米芯片纳米线薄弱环节
-
Application No.: US14659749Application Date: 2015-03-17
-
Publication No.: US09559284B2Publication Date: 2017-01-31
- Inventor: Josephine B. Chang , Paul Chang , Guy M. Cohen , Michael A. Guillorn
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L39/02 ; H01L39/22 ; H01L39/24

Abstract:
Silicided nanowires as nanobridges in Josephson junctions. A superconducting silicided nanowire is used as a weak-link bridge in a Josephson junction, and a fabrication process is employed to produce silicided nanowires that includes patterning two junction banks and a rough nanowire from a silicon substrate, reshaping the nanowire through hydrogen annealing, and siliciding the nanowire by introduction of a metal into the nanowire structure.
Public/Granted literature
- US20160276570A1 SILICIDED NANOWIRES FOR NANOBRIDGE WEAK LINKS Public/Granted day:2016-09-22
Information query