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US09559284B2 Silicided nanowires for nanobridge weak links 有权
纳米芯片纳米线薄弱环节

Silicided nanowires for nanobridge weak links
Abstract:
Silicided nanowires as nanobridges in Josephson junctions. A superconducting silicided nanowire is used as a weak-link bridge in a Josephson junction, and a fabrication process is employed to produce silicided nanowires that includes patterning two junction banks and a rough nanowire from a silicon substrate, reshaping the nanowire through hydrogen annealing, and siliciding the nanowire by introduction of a metal into the nanowire structure.
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