Invention Grant
- Patent Title: Method of manufacturing a display device
- Patent Title (中): 制造显示装置的方法
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Application No.: US14633750Application Date: 2015-02-27
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Publication No.: US09559302B2Publication Date: 2017-01-31
- Inventor: Shunpei Yamazaki , Takeshi Fukunaga
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP
- Agency: Husch Blackwell LLP
- Priority: JP11-371349 19991227
- Main IPC: B05D5/06
- IPC: B05D5/06 ; C23C16/04 ; H01L51/00 ; C23C14/04 ; C23C14/24 ; C23C14/56 ; C23C14/22 ; B05D5/12 ; B05D1/40 ; B05D1/32 ; C23C14/26 ; H01L27/32 ; H01L51/50

Abstract:
An organic material for a light emitting device is deposited over a substrate by evaporating the organic material from an evaporation source. The evaporation source comprises a plurality of discrete evaporation cells separated from each other, wherein each of the plurality of discrete evaporation cells contains the organic material. The evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width. The plurality of discrete evaporation cells is arranged along the first direction. When the organic material is evaporated, a relative location of the evaporation source with respect to the substrate is changed along the second direction, and the evaporation of the organic material is initiated by heating the plurality of discrete evaporation cells.
Public/Granted literature
- US20150171329A1 Film Formation Apparatus and Method for Forming a Film Public/Granted day:2015-06-18
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