Invention Grant
- Patent Title: Shutter blade and robot blade with CTE compensation
- Patent Title (中): 快门叶片和CTE补偿机器人刀片
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Application No.: US14217137Application Date: 2014-03-17
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Publication No.: US09564348B2Publication Date: 2017-02-07
- Inventor: Ilya Lavitsky , Keith A. Miller
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patteson & Sheridan, LLP
- Main IPC: B23F15/04
- IPC: B23F15/04 ; H01L21/67 ; H01L21/677

Abstract:
Processing chamber shutter blade and robot blade assemblies are constructed to eliminate thermal effects on the placement of elements in processing chambers. Such blade assemblies may contain at least two parts, which may include a positioning member including a low CTE material and a thermal compensating member including a high CTE material. The positioning member includes a coupling point and a reference point on a reference axis separated by a first distance. The thermal compensating member includes a connection point and a controlled point separated by another distance that is less than the first distance. A distance ratio of the first distance to the other distance is substantially equal to a CTE ratio of the high CTE material to the low CTE material, and the positioning member is joined to the thermal compensating member through the coupling point and the connection point.
Public/Granted literature
- US20140271081A1 SHUTTER BLADE AND ROBOT BLADE WITH CTE COMPENSATION Public/Granted day:2014-09-18
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