发明授权
- 专利标题: Shutter blade and robot blade with CTE compensation
- 专利标题(中): 快门叶片和CTE补偿机器人刀片
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申请号: US14217137申请日: 2014-03-17
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公开(公告)号: US09564348B2公开(公告)日: 2017-02-07
- 发明人: Ilya Lavitsky , Keith A. Miller
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patteson & Sheridan, LLP
- 主分类号: B23F15/04
- IPC分类号: B23F15/04 ; H01L21/67 ; H01L21/677
摘要:
Processing chamber shutter blade and robot blade assemblies are constructed to eliminate thermal effects on the placement of elements in processing chambers. Such blade assemblies may contain at least two parts, which may include a positioning member including a low CTE material and a thermal compensating member including a high CTE material. The positioning member includes a coupling point and a reference point on a reference axis separated by a first distance. The thermal compensating member includes a connection point and a controlled point separated by another distance that is less than the first distance. A distance ratio of the first distance to the other distance is substantially equal to a CTE ratio of the high CTE material to the low CTE material, and the positioning member is joined to the thermal compensating member through the coupling point and the connection point.
公开/授权文献
- US20140271081A1 SHUTTER BLADE AND ROBOT BLADE WITH CTE COMPENSATION 公开/授权日:2014-09-18
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