Invention Grant
US09564468B2 Composite grid structure to reduce crosstalk in back side illumination image sensors
有权
复合网格结构,减少背面照明图像传感器的串扰
- Patent Title: Composite grid structure to reduce crosstalk in back side illumination image sensors
- Patent Title (中): 复合网格结构,减少背面照明图像传感器的串扰
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Application No.: US14663899Application Date: 2015-03-20
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Publication No.: US09564468B2Publication Date: 2017-02-07
- Inventor: Keng-Yu Chou , Chun-Hao Chuang , Chien-Hsien Tseng , Shyh-Fann Ting , Wei-Chieh Chiang , Yuichiro Yamashita
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor structure for back side illumination (BSI) pixel sensors is provided. Photodiodes are arranged within a semiconductor substrate. A metal grid overlies the semiconductor substrate and is made up of metal grid segments that surround outer perimeters of the photodiodes, respectively, such that first openings within the metal grid overlie the photodiodes, respectively. A low-n grid is made up of low-n grid segments that surround the respective outer perimeters of the photodiodes, respectively, such that second openings within the low-n grid overlie the photodiodes, respectively. Color filters are arranged in the first and second openings of the photodiodes and have a refractive index greater than a refractive index of the low-n grid. A substrate isolation grid extends into the semiconductor substrate and is made up of isolation grid segments that surround outer perimeters of the photodiodes, respectively. A method for manufacturing the BSI pixel sensors is also provided.
Public/Granted literature
- US20160276394A1 COMPOSITE GRID STRUCTURE TO REDUCE CROSSTALK IN BACK SIDE ILLUMINATION IMAGE SENSORS Public/Granted day:2016-09-22
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