Invention Grant
- Patent Title: Magnetoresistive sensor integrated in a chip for detecting magnetic fields perpendicular to the chip and manufacturing process thereof
- Patent Title (中): 集成在用于检测垂直于芯片的磁场的芯片中的磁阻传感器及其制造方法
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Application No.: US14102899Application Date: 2013-12-11
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Publication No.: US09568566B2Publication Date: 2017-02-14
- Inventor: Dario Paci , Dino Faralli , Andrea Picco
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITTO2012A1067 20121212
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R33/09 ; G01R33/00
Abstract:
An integrated magnetoresistive sensor, formed in a chip including a substrate having a surface and an insulating region covering the surface of the substrate. A magnetoresistor, of a first ferromagnetic material, is formed in the insulating region and has a sensitivity plane parallel to the surface. A concentrator of a second ferromagnetic material is formed in the substrate and has at least one arm extending in a transverse direction to the sensitivity plane. The arm has one end in contact with the magnetoresistor.
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