Invention Grant
- Patent Title: Vertical capacitors with spaced conductive lines
- Patent Title (中): 具有间隔导线的垂直电容器
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Application No.: US14298040Application Date: 2014-06-06
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Publication No.: US09576735B2Publication Date: 2017-02-21
- Inventor: Roderick Alan Augur , Jason Eugene Stephens
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522 ; H01G4/30 ; H01G4/005 ; H01G4/06 ; H01G4/38 ; H01G4/01 ; H01G4/232

Abstract:
A capacitor structure includes a first metal layer including a first plurality of horizontally-spaced neutral conductive lines positioned horizontally between a first plurality of horizontally-spaced high voltage conductive lines. The capacitor structure further includes a second metal layer including a second plurality of horizontally-spaced neutral conductive lines positioned horizontally between a second plurality of horizontally-spaced high voltage conductive lines. The capacitor structure further includes a third metal layer positioned vertically below the first metal layer and above the second metal layer, the third metal layer including a third plurality of horizontally-spaced neutral conductive lines positioned horizontally between a first plurality of horizontally-spaced low voltage conductive lines. The first plurality of low voltage lines are positioned vertically between the first and second plurality of neutral lines.
Public/Granted literature
- US20150357120A1 VERTICAL CAPACITORS WITH SPACED CONDUCTIVE LINES Public/Granted day:2015-12-10
Information query
IPC分类: