Invention Grant
- Patent Title: Encapsulated dies with enhanced thermal performance
-
Application No.: US14959129Application Date: 2015-12-04
-
Publication No.: US09576822B2Publication Date: 2017-02-21
- Inventor: Thomas Scott Morris , David Jandzinski , Stephen Parker , Jon Chadwick , Julio C. Costa
- Applicant: RF Micro Devices, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L21/56 ; H01L25/065 ; H01L23/31 ; H01L23/29 ; H01L23/373

Abstract:
The present disclosure relates to enhancing the thermal performance of encapsulated flip chip dies. According to an exemplary process, a plurality of flip chip dies are attached on a top surface of a carrier, and a first mold compound is applied over the top surface of the carrier to encapsulate the plurality of flip chip dies. The first mold compound is thinned down to expose a substrate of each flip chip die and the substrate of each flip chip die is then substantially etched away to provide an etched flip chip die that has an exposed surface at the bottom of a cavity. Next, a second mold compound with high thermal conductivity is applied to substantially fill each cavity and the top surface of the second mold compound is planarized. Finally, the encapsulated etched flip chip dies can be marked, singulated, and tested as a module.
Public/Granted literature
- US09613831B2 Encapsulated dies with enhanced thermal performance Public/Granted day:2017-04-04
Information query
IPC分类: