Invention Grant
- Patent Title: Fabrication of nanowire field effect transistor structures
- Patent Title (中): 纳米线场效应晶体管结构的制作
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Application No.: US14524628Application Date: 2014-10-27
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Publication No.: US09576856B2Publication Date: 2017-02-21
- Inventor: Hui Zang , Bingwu Liu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Nathan B. Davis
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/8238

Abstract:
Methods are presented for facilitating fabrication of nanowire structures, such as one or more nanowire field effect transistors. The methods include, for instance: providing a substrate; providing first material layers and second material layers above the substrate, the first material layers interleaved with the second material layers; removing portions of the first material layers and second material layers, the removing forming a plurality of nanowire stacks, including first material nanowires and second material nanowires; removing the first material nanowires from at least one nanowire stack; and removing the second material nanowires from at least one other nanowire stack, where the at least one nanowire stack and at least one other nanowire stack include a p-type nanowire stack(s) and a n-type nanowire stack(s), respectively.
Public/Granted literature
- US20160118304A1 FABRICATION OF NANOWIRE STRUCTURES Public/Granted day:2016-04-28
Information query
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