Invention Grant
- Patent Title: Methods of forming fins with different fin heights
- Patent Title (中): 形成不同翅片高度的翅片的方法
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Application No.: US15054314Application Date: 2016-02-26
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Publication No.: US09577066B1Publication Date: 2017-02-21
- Inventor: Fuad Al-Amoody , Jinping Liu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234

Abstract:
One illustrative method disclosed herein includes, among other things, forming first and second fins, forming a liner layer above at least a first upper surface of the first fin and a second upper surface of the second fin, and forming an ion-containing region in the first portion of the liner layer while not forming the ion-containing region in second portion of the liner layer. The method also includes performing a liner etching process so as to remove the second portion of the liner layer while leaving at least a portion of the first portion of the liner layer positioned above the first fin, and performing at least one etching process to define a reduced-height second fin that is less than an initial first height of the first fin.
Information query
IPC分类: