Invention Grant
US09583558B2 High breakdown voltage microelectronic device isolation structure with improved reliability
有权
高击穿电压微电子器件隔离结构具有改进的可靠性
- Patent Title: High breakdown voltage microelectronic device isolation structure with improved reliability
- Patent Title (中): 高击穿电压微电子器件隔离结构具有改进的可靠性
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Application No.: US15045421Application Date: 2016-02-17
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Publication No.: US09583558B2Publication Date: 2017-02-28
- Inventor: Jeffrey Alan West , Thomas D. Bonifield , Byron Lovell Williams
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Tuenlap D. Chan; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L49/02 ; H01L21/02 ; H01L29/78 ; H01L27/06 ; H01L21/8234 ; H01L29/06 ; H01L29/66

Abstract:
A microelectronic device contains a high voltage component having a high voltage node and a low voltage node. The high voltage node is isolated from the low voltage node by a main dielectric between the high voltage node and low voltage elements at a surface of the substrate of the microelectronic device. A lower-bandgap dielectric layer is disposed between the high voltage node and the main dielectric. The lower-bandgap dielectric layer contains at least one sub-layer with a bandgap energy less than a bandgap energy of the main dielectric. The lower-bandgap dielectric layer extends beyond the high voltage node continuously around the high voltage node. The lower-bandgap dielectric layer has an isolation break surrounding the high voltage node at a distance of at least twice the thickness of the lower-bandgap dielectric layer from the high voltage node.
Public/Granted literature
- US20160172434A1 High Breakdown Voltage Microelectronic Device Isolation Structure with Improved Reliability Public/Granted day:2016-06-16
Information query
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