Invention Grant
- Patent Title: Temperature controllable gas laser oscillator
- Patent Title (中): 温度可控气体激光振荡器
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Application No.: US15053152Application Date: 2016-02-25
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Publication No.: US09583909B2Publication Date: 2017-02-28
- Inventor: Tetsuhisa Takazane
- Applicant: FANUC CORPORATION
- Applicant Address: JP Tamanashi
- Assignee: Fanuc Corporation
- Current Assignee: Fanuc Corporation
- Current Assignee Address: JP Tamanashi
- Agency: RatnerPrestia
- Priority: JP2015-039131 20150227
- Main IPC: H01S3/04
- IPC: H01S3/04 ; H01S3/041 ; H01S3/00 ; H01S3/104 ; H01S3/223 ; H01S3/03 ; H01S3/036

Abstract:
A gas laser oscillator according to the present invention comprises a resonator unit, a heat exchanger through which a fluid exchanging heat with a laser gas flows, a chiller for cooling the fluid in the heat exchanger and supplying the fluid to the heat exchanger, and a heat transfer device for transferring heat of the fluid to the resonator unit. The gas laser oscillator further comprises a first flow path for supplying the fluid used for cooling the laser gas in the heat exchanger to the heat transfer device, a second flow path for supplying the fluid cooled by the chiller to the heat transfer device prior to supplying the fluid to the heat exchanger, and a switching valve for switching either one of a first flow path and a second flow path.
Public/Granted literature
- US20160254635A1 TEMPERATURE CONTROLLABLE GAS LASER OSCILLATOR Public/Granted day:2016-09-01
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