Invention Grant
- Patent Title: Fluid processing systems and methods
- Patent Title (中): 流体处理系统和方法
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Application No.: US14703467Application Date: 2015-05-04
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Publication No.: US09586188B2Publication Date: 2017-03-07
- Inventor: Steven M. Lurcott , John E. Q. Hughes , Peter Wrschka , Thomas H. Baum , Donald D. Ware , Peng Zou
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: G01F11/00
- IPC: G01F11/00 ; B01F15/02 ; B67D7/02 ; B67D7/74 ; B65B3/14 ; B01F3/08

Abstract:
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
Public/Granted literature
- US20150321897A1 FLUID PROCESSING SYSTEMS AND METHODS Public/Granted day:2015-11-12
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