Fluid processing systems and methods
    1.
    发明授权
    Fluid processing systems and methods 有权
    流体处理系统和方法

    公开(公告)号:US09586188B2

    公开(公告)日:2017-03-07

    申请号:US14703467

    申请日:2015-05-04

    Applicant: ENTEGRIS, INC.

    Abstract: Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.

    Abstract translation: 公开了用于将含流体的进料传送到加工设备的系统和方法。 基于衬管的压力分配容器通过在衬套和外包装之间施加真空而进行填充。 不同校准流量范围的多个进料流量控制器可以针对单个进料进行选择性并行操作。 用于放大的进料混合和测试可以通过由多个基于衬管的压力分配容器供应的进料进行。 重量分析系统可用于测定多组分溶液或混合物中至少一种组分的浓度。

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