Invention Grant
- Patent Title: Slit valve with a pressurized gas bearing
- Patent Title (中): 带加压气体轴承的狭槽阀
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Application No.: US14456258Application Date: 2014-08-11
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Publication No.: US09587749B2Publication Date: 2017-03-07
- Inventor: Michael R. Rice , Natan Schlimoff , Igor Krivts (Krayvitz) , Israel Avneri , Yoram Uziel , Erez Admoni , Paul Reuter , William (Ty) Weaver
- Applicant: Applied Materials Israel, Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: F16K3/00
- IPC: F16K3/00 ; F16K25/00 ; F16K3/02 ; F16K39/04 ; F16K25/02 ; F16K51/02 ; F16K3/18

Abstract:
There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.
Public/Granted literature
- US20150075659A1 SLIT VALVE WITH A PRESSURIZED GAS BEARING Public/Granted day:2015-03-19
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