Invention Grant
- Patent Title: Spectroscopic sensor
- Patent Title (中): 光谱传感器
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Application No.: US14349080Application Date: 2012-09-10
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Publication No.: US09587980B2Publication Date: 2017-03-07
- Inventor: Katsumi Shibayama , Takashi Kasahara
- Applicant: Katsumi Shibayama , Takashi Kasahara
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JPP2011-220180 20111004
- International Application: PCT/JP2012/073080 WO 20120910
- International Announcement: WO2013/051372 WO 20130411
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J3/45 ; G01J3/02 ; G01J3/26 ; G01J3/36 ; G01J3/51 ; G01J3/28 ; G01J3/12

Abstract:
A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and mirror layers 22, 23 opposing each other through the layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the layer 22 side, for transmitting therethrough light incident on the unit 20; and a light-detecting substrate 4, arranged on the layer 23 side, for detecting the light transmitted through the unit 20. The layer 21 has a filter region 24 held between the layers 22, 23; an annular surrounding region 25 surrounding the region 24 with a predetermined distance therefrom; and an annular connecting region 26 connecting an end part 24e on the substrate 4 side of the region 24 and an end part 25e on the substrate 4 side of the region 25 to each other.
Public/Granted literature
- US20140313514A1 SPECTROSCOPIC SENSOR Public/Granted day:2014-10-23
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