Invention Grant
US09589911B1 Integrated circuit structure with metal crack stop and methods of forming same
有权
具有金属裂纹的集成电路结构及其形成方法
- Patent Title: Integrated circuit structure with metal crack stop and methods of forming same
- Patent Title (中): 具有金属裂纹的集成电路结构及其形成方法
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Application No.: US14837461Application Date: 2015-08-27
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Publication No.: US09589911B1Publication Date: 2017-03-07
- Inventor: Jim S. Liang , Atsushi Ogino , Roger A. Quon , Stephen E. Greco
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L21/14
- IPC: H01L21/14 ; H01L21/784 ; H01L23/528 ; H01L23/538 ; H01L23/00 ; H01L23/535 ; H01L23/532 ; H01L21/768

Abstract:
Embodiments of the present disclosure provide an integrated circuit (IC) structure with a metal crack stop and methods of forming the same. An IC structure according to embodiments of the present disclosure can include an insulator positioned over a substrate; a barrier film positioned over the insulator; an interlayer dielectric positioned over the barrier film; and a metal crack stop positioned over the substrate and laterally adjacent to each of the insulator, the barrier film, and the interlayer dielectric, wherein the metal crack stop includes a sidewall having a first recess therein, and wherein a horizontal interface between the barrier film and the interlayer dielectric intersects the sidewall of the metal crack stop.
Public/Granted literature
- US20170062354A1 INTEGRATED CIRCUIT STRUCTURE WITH METAL CRACK STOP AND METHODS OF FORMING SAME Public/Granted day:2017-03-02
Information query
IPC分类: