Invention Grant
- Patent Title: Thin film transistor array panel and manufacturing method thereof
- Patent Title (中): 薄膜晶体管阵列面板及其制造方法
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Application No.: US15010497Application Date: 2016-01-29
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Publication No.: US09589998B2Publication Date: 2017-03-07
- Inventor: Do-Hyun Kim , Yoon Ho Khang , Dong-Hoon Lee , Sang Ho Park , Se Hwan Yu , Cheol Kyu Kim , Yong-Su Lee , Sung Haeng Cho , Chong Sup Chang , Dong Jo Kim , Jung Kyu Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2011-0077021 20110802
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/45
Abstract:
A thin film transistor array panel includes: a gate wiring layer disposed on a substrate; an oxide semiconductor layer disposed on the gate wiring layer; and a data wiring layer disposed on the oxide semiconductor layer, in which the data wiring layer includes a main wiring layer including copper and a capping layer disposed on the main wiring layer and including a copper alloy.
Public/Granted literature
- US20160148958A1 THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-05-26
Information query
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