Invention Grant
- Patent Title: Methods and apparatus for treating exhaust gas in a processing system
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Application No.: US14300372Application Date: 2014-06-10
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Publication No.: US09597634B2Publication Date: 2017-03-21
- Inventor: Colin John Dickinson , Mehran Moalem , Daniel O. Clark
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: B01D53/92
- IPC: B01D53/92 ; B01D53/32

Abstract:
Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a plasma source coupled to a foreline of a process chamber, a reagent source coupled to the foreline upstream of the plasma source, and a foreline gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the foreline injection kit includes a pressure regulator to set a foreline gas delivery pressure setpoint, and a first pressure gauge coupled to monitor a delivery pressure of the gas.
Public/Granted literature
- US20140291139A1 METHODS AND APPARATUS FOR TREATING EXHAUST GAS IN A PROCESSING SYSTEM Public/Granted day:2014-10-02
Information query
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