Invention Grant
- Patent Title: Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
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Application No.: US14534574Application Date: 2014-11-06
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Publication No.: US09597734B2Publication Date: 2017-03-21
- Inventor: Jennifer Sun , Sumanth Banda , Ren-Guan Duan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: B23B31/28
- IPC: B23B31/28 ; B23Q3/00 ; B05B1/14 ; B23B31/02 ; B32B15/08 ; C04B35/626 ; C04B35/634 ; C04B37/00 ; C04B37/02 ; H01L21/683

Abstract:
Embodiments of the present disclosure generally provide chamber components with enhanced thermal properties and methods of enhancing thermal properties of chamber components including bonding materials. One embodiment of the present disclosure provides a method for fabricating a composite structure. The method includes applying a bonding material to a first component, and converting the bonding material applied to the first component to an enhanced bonding layer by heating the bonding material to outgas volatile species from the bonding material. The outgassed volatile species accumulates to at least 0.05% in mass of the bonding material. The method further includes contacting a second component and the enhanced bonding layer to join the first and second components.
Public/Granted literature
- US20150061237A1 ELECTROSTATIC CHUCK AND SHOWERHEAD WITH ENHANCED THERMAL PROPERTIES AND METHODS OF MAKING THEREOF Public/Granted day:2015-03-05
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