- Patent Title: Method of fabricating sputtering target, sputtering target using the method, and method of manufacturing organic light-emitting display apparatus using the sputtering target
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Application No.: US14205624Application Date: 2014-03-12
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Publication No.: US09598764B2Publication Date: 2017-03-21
- Inventor: Sang-Wook Shin , Sun-Young Jung , Il-Sang Lee , Jin-Woo Park , Dong-Jin Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2013-0082438 20130712
- Main IPC: C04B35/457
- IPC: C04B35/457 ; C23C14/34 ; C23C14/08 ; H01J37/34 ; H01L51/52

Abstract:
A method of fabricating a sputtering target includes preparing a first powder material including at least one of a tin oxide and a mesh-forming oxide; mixing the first powder material and a second powder material comprising carbon or a tin oxide to prepare a mixture; simultaneously performing a primary compression and primary sintering on the mixture in a reduction atmosphere; and simultaneously performing a secondary compression and secondary sintering on the mixture in the reduction atmosphere to prepare the sputtering target.
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