Invention Grant
- Patent Title: Method, apparatus and system for a transferable micromachined piezoelectric transducer array
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Application No.: US14152899Application Date: 2014-01-10
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Publication No.: US09604255B2Publication Date: 2017-03-28
- Inventor: Arman Hajati , Ut Tran , Darren Todd Imai , Martin Schoeppler
- Applicant: Arman Hajati , Ut Tran , Darren Todd Imai , Martin Schoeppler
- Applicant Address: US NH Lebanon
- Assignee: FUJIFILM DIMATIX, INC.
- Current Assignee: FUJIFILM DIMATIX, INC.
- Current Assignee Address: US NH Lebanon
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L41/33
- IPC: H01L41/33 ; B06B1/06 ; H01L41/09 ; H01L41/313 ; H01L41/331

Abstract:
Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.
Public/Granted literature
- US20150200350A1 METHOD, APPARATUS AND SYSTEM FOR A TRANSFERABLE MICROMACHINED PIEZOELECTRIC TRANSDUCER ARRAY Public/Granted day:2015-07-16
Information query
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