A laser metrology system may include a modulated measurement beam, a beam splitter for splitting the measurement beam into a local oscillator beam and a transmitted beam, an optical assembly for projecting the transmitted beam to a measured area on a surface of a target structure and for receiving a reflected beam from the measured area, a beam combiner for combining the reflected beam and the local oscillator beam into a detection beam, a detector for processing the detection beam, the detector including a micro-lens for projecting the detection beam, a photodetector for carrying out coherent detection of the detection beam and detector electronics in communication with the photodetector for generating informational data from the detection beam, and a range processor for computing dimensional data about the measured area from the informational data.