- 专利标题: Impedance-based adjustment of power and frequency
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申请号: US14850851申请日: 2015-09-10
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公开(公告)号: US09607810B2公开(公告)日: 2017-03-28
- 发明人: John C. Valcore, Jr. , Bradford J. Lyndaker
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: H05B7/00
- IPC分类号: H05B7/00 ; H01J37/32
摘要:
Systems and methods for impedance-based adjustment of power and frequency are described. A system includes a plasma chamber for containing plasma. The plasma chamber includes an electrode. The system includes a driver and amplifier coupled to the plasma chamber for providing a radio frequency (RF) signal to the electrode. The driver and amplifier is coupled to the plasma chamber via a transmission line. The system further includes a selector coupled to the driver and amplifier, a first auto frequency control (AFC) coupled to the selector, and a second AFC coupled to the selector. The selector is configured to select the first AFC or the second AFC based on values of current and voltage sensed on the transmission line.
公开/授权文献
- US20160005573A1 IMPEDANCE-BASED ADJUSTMENT OF POWER AND FREQUENCY 公开/授权日:2016-01-07
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