Invention Grant
- Patent Title: Low temperature method for hermetically joining non-diffusing ceramic materials
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Application No.: US14292804Application Date: 2014-05-30
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Publication No.: US09624137B2Publication Date: 2017-04-18
- Inventor: Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
- Applicant: Component Re-Engineering Company, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Component Re-Engineering Company, Inc.
- Current Assignee: Component Re-Engineering Company, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Michael A. Guth
- Main IPC: B23K31/02
- IPC: B23K31/02 ; C04B37/00 ; B23K35/28 ; B23K1/00 ; B23K1/19 ; B23K1/20 ; B23K35/00 ; B32B9/00 ; B32B9/04 ; B32B15/20 ; C04B35/645 ; H01L21/687 ; B23K35/38 ; B23K1/008 ; B23K3/08 ; F16B9/00 ; F16B11/00

Abstract:
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
Public/Granted literature
- US20150108203A1 Low Temperature Method For Hermetically Joining Non-Diffusing Ceramic Materials Public/Granted day:2015-04-23
Information query
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