公开(公告)号：US10153183B2

公开(公告)日：2018-12-11

申请号：US14543376

申请日：2014-11-17

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： H01L21/67 ,  B23K1/00 ,  B23K1/008 ,  B23K1/19 ,  H01L21/683 ,  H01L21/687 ,  B23K101/40

摘要： A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.

公开(公告)号：US20150287620A1

公开(公告)日：2015-10-08

申请号：US14543376

申请日：2014-11-17

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： H01L21/67 ,  B23K1/00 ,  B23K1/19 ,  H01L21/683

CPC分类号： H01L21/67103 ,  B23K1/0012 ,  B23K1/0016 ,  B23K1/008 ,  B23K1/19 ,  B23K2101/40 ,  H01L21/6833 ,  H01L21/68792 ,  Y10T279/23 ,  Y10T428/131 ,  Y10T428/1317

摘要： A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.

摘要翻译： 一种用于将陶瓷件接合到适于用于半导体加工的组件中的方法。 连接的片适于在衬底处理，室清洁过程以及可在加热器或静电吸盘的轴内看到的氧化气氛下承受处理室内的环境。 陶瓷件可以是氮化铝，并且这些件可以用铝钎焊。 接头材料适于在衬底处理期间承受处理室内的环境以及可在加热器或静电吸盘的轴内看到的氧化气氛。 接头适于在接头上提供气密密封。 接合件适于在稍后的时间被分离，以期期望返修或更换其中一件。

公开(公告)号：US20180277352A1

公开(公告)日：2018-09-27

申请号：US15955693

申请日：2018-04-18

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： H01L21/02 ,  H01L21/67 ,  H05B3/28 ,  H01L21/687

CPC分类号： H01L21/02002 ,  H01L21/67103 ,  H01L21/67248 ,  H01L21/68792 ,  H05B3/283 ,  H05B2203/002 ,  H05B2203/037

摘要： A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

公开(公告)号：US20170263486A1

公开(公告)日：2017-09-14

申请号：US15341843

申请日：2016-11-02

申请人： Component Re-Engineering Company, Inc.

发明人： Brent Donald Alfred Elliot ,  Frank Balma ,  Michael Parker ,  Jason Stephens ,  Guleid Hussen

IPC分类号： H01L21/683

CPC分类号： H01L21/6833 ,  B23K1/00 ,  B23K1/0016 ,  B23K1/008 ,  B23K1/19 ,  B23K1/206 ,  B23K2101/42 ,  B23K2103/18 ,  B23K2103/52 ,  B23K2103/54 ,  B23Q3/15 ,  C04B37/00 ,  C04B37/003 ,  C04B2237/121 ,  C04B2237/343 ,  C04B2237/366 ,  C04B2237/50 ,  C04B2237/68 ,  H01L21/6831 ,  H01L21/68757

摘要： An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.

公开(公告)号：US20170259364A1

公开(公告)日：2017-09-14

申请号：US15419952

申请日：2017-01-30

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： B23K1/00

CPC分类号： B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B23K2103/10 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B37/006 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H05B1/00 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

公开(公告)号：US20170036285A1

公开(公告)日：2017-02-09

申请号：US15065500

申请日：2016-03-09

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： B23K1/00 ,  B32B18/00 ,  B32B15/20 ,  H01L21/683 ,  B23K1/19 ,  B23K35/28 ,  H01L21/67 ,  B32B7/14 ,  B32B3/30

CPC分类号： C04B37/006 ,  B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B23K2103/10 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H05B1/00 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。

公开(公告)号：US09556074B2

公开(公告)日：2017-01-31

申请号：US13682171

申请日：2012-11-20

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： B23K1/00 ,  B23K35/00 ,  C04B37/00 ,  B32B18/00 ,  H05B1/00 ,  B32B9/00 ,  B32B15/20 ,  F16B9/00 ,  C04B35/645 ,  B32B9/04 ,  B23K1/19 ,  B23K1/20 ,  B23K35/28

CPC分类号： B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B23K2103/10 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B37/006 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H05B1/00 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。

公开(公告)号：US20150108203A1

公开(公告)日：2015-04-23

申请号：US14292804

申请日：2014-05-30

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： C04B37/00 ,  B23K35/28

CPC分类号： C04B37/006 ,  B23K1/0016 ,  B23K1/008 ,  B23K1/19 ,  B23K1/20 ,  B23K3/087 ,  B23K35/005 ,  B23K35/286 ,  B23K35/38 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B37/06 ,  B32B37/10 ,  C04B35/645 ,  C04B37/001 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/60 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  F16B11/006 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/68785 ,  H01L21/68792 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

摘要翻译： 一种用于将陶瓷件与密封接头接合的方法，包括在两块之间钎焊一层接合材料。 通过选择接合材料，接合温度，接合气氛等因素来控制接合材料的润湿和流动。 陶瓷片可以是非扩散型，例如氮化铝，氧化铝，氧化铍和氧化锆，并且这些片可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。

公开(公告)号：US08789743B2

公开(公告)日：2014-07-29

申请号：US13681875

申请日：2012-11-20

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： B23K31/02

CPC分类号： B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B23K2103/10 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B37/006 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H05B1/00 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。

公开(公告)号：US20140197227A1

公开(公告)日：2014-07-17

申请号：US13682171

申请日：2012-11-20

申请人： Component Re-Engineering Company, Inc.

发明人： Alfred Grant Elliot ,  Brent Donald Alfred Elliot ,  Frank Balma ,  Richard Erich Schuster ,  Dennis George Rex ,  Alexander Veytser

IPC分类号： C04B37/00

CPC分类号： B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B23K2103/10 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B37/006 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/6582 ,  C04B2235/945 ,  C04B2237/121 ,  C04B2237/122 ,  C04B2237/126 ,  C04B2237/127 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/348 ,  C04B2237/36 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/592 ,  C04B2237/61 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/68 ,  C04B2237/704 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/76 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H05B1/00 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。