A semiconductor device with a metal-containing layer, a first semiconductor layer, that is formed on top of the metal-containing layer, and a resistor that is formed in the metal-containing layer and that is contacted through the first semiconductor layer is provided. Furthermore, a method of manufacturing a semiconductor device is provided, wherein the method comprises manufacturing of a resistor with the following steps: formation of a metal-containing layer over a wafer, particularly a SOI wafer, formation of a first semiconductor layer on top of the metal-containing layer and formation of a contact through the semiconductor layer to the metal-containing layer.