Invention Grant
- Patent Title: Semiconductor device having an inactive-fin
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Application No.: US15051056Application Date: 2016-02-23
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Publication No.: US09627481B2Publication Date: 2017-04-18
- Inventor: Byungjae Park , Myeongcheol Kim , Hagju Cho
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0077404 20150601
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/78 ; H01L27/088

Abstract:
A semiconductor device includes a multi-fin active region having a plurality of sub-fins sequentially arranged on a substrate. A gate electrode crosses the multi-fin active region. Source/drain regions are disposed on the sub-fins except a first sub-fin and a last sub-fin. A contact plug is disposed on the source/drain regions.
Public/Granted literature
- US20160351663A1 SEMICONDUCTOR DEVICE HAVING AN INACTIVE-FIN AND A METHOD OF FORMING THE SAME Public/Granted day:2016-12-01
Information query
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