- Patent Title: Metal nitride keyhole or spacer phase change memory cell structures
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Application No.: US14633264Application Date: 2015-02-27
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Publication No.: US09627612B2Publication Date: 2017-04-18
- Inventor: Matthew Joseph BrightSky , SangBum Kim , Chung Hon Lam , Norma Edith Sosa Cortes
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
Non-volatile memory cell having small programming power and a reduced resistance drift are provided. In one embodiment of the present application, a non-volatile memory cell is provided that includes a layer of dielectric material that has a via opening that exposes a surface of a bottom electrode. A metal nitride spacer is located along a bottom portion of each sidewall surface of the layer of dielectric material and in the via opening. A phase change material structure is present in the via opening and contacting a top portion of each sidewall surface of the layer of dielectric material and a topmost surface of each metal nitride spacer. A top electrode is located on a topmost surface of the phase change material structure.
Public/Granted literature
- US20150243884A1 METAL NITRIDE KEYHOLE OR SPACER PHASE CHANGE MEMORY CELL STRUCTURES Public/Granted day:2015-08-27
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