Invention Grant
- Patent Title: Electro-optical modulator with a vertical capacitor structure
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Application No.: US15009483Application Date: 2016-01-28
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Publication No.: US09632335B2Publication Date: 2017-04-25
- Inventor: Vipulkumar Patel , Prakash Gothoskar
- Applicant: Cisco Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Cisco Technology, Inc.
- Current Assignee: Cisco Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patterson + Sheridan LLP
- Main IPC: G02F1/025
- IPC: G02F1/025 ; G02B6/132 ; G02B6/136 ; G02F1/225 ; G02F1/01 ; G02F1/015

Abstract:
An optical modulator may include a leftmost waveguide, a rightmost waveguide, and a dielectric layer disposed therebetween. In one embodiment, the waveguides may be disposed on the same plane. When a voltage potential is created between the rightmost and leftmost waveguides, these layers form a silicon-insulator-silicon capacitor (also referred to as SISCAP) structure that provides efficient, high-speed optical modulation of an optical signal passing through the modulator. As opposed to a horizontal SISCAP structure where the dielectric layer is disposed between upper and lower waveguides, arranging the dielectric layer between waveguides disposed on the same plane results in a vertical SISCAP structure. In one embodiment, the leftmost and rightmost waveguide are both made from crystalline silicon.
Public/Granted literature
- US20160147087A1 ELECTRO-OPTICAL MODULATOR WITH A VERTICAL CAPACITOR STRUCTURE Public/Granted day:2016-05-26
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