- 专利标题: Elevator linear motor drive
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申请号: US14477783申请日: 2014-09-04
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公开(公告)号: US09633880B2公开(公告)日: 2017-04-25
- 发明人: Stuart Scollay
- 申请人: Intevac, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: INTEVAC, INC.
- 当前专利权人: INTEVAC, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Womble Carlyle Sandridge & Rice LLP
- 代理商 Joseph Bach, Esq.
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; G11B5/84 ; H01L21/673
摘要:
Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.
公开/授权文献
- US20140377040A1 ELEVATOR LINEAR MOTOR DRIVE 公开/授权日:2014-12-25
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