Invention Grant
- Patent Title: Apparatus for generating extreme ultraviolet light
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Application No.: US14995398Application Date: 2016-01-14
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Publication No.: US09635749B2Publication Date: 2017-04-25
- Inventor: Sung-Joo Kim , Jin-Seok Heo , Do-Hyun Seo , Da-Hae Lee , Jae-Pil Lee , Sung-Jo Hwang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si. Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si. Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0037982 20150319
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01S3/223

Abstract:
An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.
Public/Granted literature
- US20160278195A1 APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT Public/Granted day:2016-09-22
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