METHOD OF MANUFACTURING A MASK
    7.
    发明申请
    METHOD OF MANUFACTURING A MASK 审中-公开
    制作面膜的方法

    公开(公告)号:US20160131970A1

    公开(公告)日:2016-05-12

    申请号:US14994404

    申请日:2016-01-13

    Abstract: A method of manufacturing a mask includes dividing an upper surface of a template having a design pattern into a plurality of regions, the template being arranged over a polymer layer on a mask substrate, correcting a distorted region among the regions, pressing the polymer layer with the template to form a mask pattern corresponding to the design pattern on the polymer layer; and curing the mask pattern.

    Abstract translation: 制造掩模的方法包括将具有设计图案的模板的上表面划分为多个区域,模板布置在掩模基板上的聚合物层上,校正区域之间的变形区域,将聚合物层与 该模板形成对应于聚合物层上的设计图案的掩模图案; 并固化掩模图案。

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