公开(公告)号：US09635749B2

公开(公告)日：2017-04-25

申请号：US14995398

申请日：2016-01-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Joo Kim ,  Jin-Seok Heo ,  Do-Hyun Seo ,  Da-Hae Lee ,  Jae-Pil Lee ,  Sung-Jo Hwang

IPC: H05G2/00 ,  H01S3/223

CPC classification number: H05G2/006 ,  G21K2201/065 ,  H01S3/2232 ,  H05G2/005 ,  H05G2/008

Abstract: An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.