Invention Grant
- Patent Title: Rectangular parallelepiped fluid storage and dispensing vessel
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Application No.: US14746776Application Date: 2015-06-22
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Publication No.: US09636626B2Publication Date: 2017-05-02
- Inventor: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco
- Applicant: Entegris, Inc. , Judith A. Moroco
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc. Legal Dept.
- Agent Nidhi G. Kissoon; John E. Pillion
- Main IPC: B01D53/04
- IPC: B01D53/04 ; F17C11/00 ; B01D53/053 ; F17C13/08

Abstract:
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Public/Granted literature
- US20150306537A1 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL Public/Granted day:2015-10-29
Information query
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