-
公开(公告)号:US09636626B2
公开(公告)日:2017-05-02
申请号:US14746776
申请日:2015-06-22
申请人: Entegris, Inc. , Judith A. Moroco
发明人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco
IPC分类号: B01D53/04 , F17C11/00 , B01D53/053 , F17C13/08
CPC分类号: B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
-
公开(公告)号:US20090173225A1
公开(公告)日:2009-07-09
申请号:US12401325
申请日:2009-03-10
申请人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
发明人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
CPC分类号: B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译: 液体储存和分配设备包括具有长方体形状的流体储存和分配容器,以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。 通过使用物理吸附剂和化学吸附剂介质,可以提高气柜的操作安全性,例如,从气柜提供的工艺气体具有有毒或其他危险性质。
-
公开(公告)号:US07501010B2
公开(公告)日:2009-03-10
申请号:US11227944
申请日:2005-09-15
申请人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Judith A. Moroco, legal representative
发明人: Philip A. Moroco
IPC分类号: B01D53/04
CPC分类号: B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译: 液体储存和分配设备包括具有长方体形状的流体储存和分配容器,以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。 通过使用物理吸附剂和化学吸附剂介质,可以提高气柜的操作安全性,例如,从气柜提供的工艺气体具有有毒或其他危险性质。
-
公开(公告)号:US09062829B2
公开(公告)日:2015-06-23
申请号:US13966091
申请日:2013-08-13
发明人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco
CPC分类号: B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译: 液体储存和分配设备包括具有长方体形状的流体储存和分配容器,以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。 通过使用物理吸附剂和化学吸附剂介质,可以提高气柜的操作安全性,例如,从气柜提供的工艺气体具有有毒或其他危险性质。
-
公开(公告)号:US20110277846A1
公开(公告)日:2011-11-17
申请号:US13168987
申请日:2011-06-26
申请人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
发明人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco , Judith A. Moroco
CPC分类号: B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译: 液体储存和分配设备包括具有长方体形状的流体储存和分配容器,以及在通气气体柜中包括这种流体储存和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。 通过使用物理吸附剂和化学吸附剂介质,可以提高气柜的操作安全性,例如,从气柜提供的工艺气体具有有毒或其他危险性质。
-
公开(公告)号:US20150306537A1
公开(公告)日:2015-10-29
申请号:US14746776
申请日:2015-06-22
申请人: Entegris, Inc.
发明人: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Philip A. Moroco
IPC分类号: B01D53/053 , F17C11/00 , F17C13/08
CPC分类号: B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
-
-
-
-
-