- 专利标题: Highly scalable single-poly non-volatile memory cell
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申请号: US14719342申请日: 2015-05-22
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公开(公告)号: US09640262B2公开(公告)日: 2017-05-02
- 发明人: Te-Hsun Hsu , Chun-Hsiao Li , Hsuen-Wei Chen
- 申请人: eMemory Technology Inc.
- 申请人地址: TW Hsin-Chu
- 专利权人: eMemory Technology Inc.
- 当前专利权人: eMemory Technology Inc.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu; Scott Margo
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; G11C16/08 ; G11C17/16 ; G11C17/18 ; H01L27/112 ; G11C16/10 ; G11C16/26 ; G11C17/04 ; G11C17/08 ; H01L23/528 ; H01L27/06 ; H01L29/10 ; H01L29/49 ; H01L29/93 ; H01L27/11524 ; H03K3/356 ; G11C17/14 ; G11C29/00 ; H01L23/525
摘要:
A nonvolatile memory cell includes a semiconductor substrate, a first OD region, a second OD region, an isolation region separating the first OD region from the second OD region, a PMOS select transistor disposed on the first OD region, and a PMOS floating gate transistor serially connected to the select transistor and disposed on the first OD region. The PMOS floating gate transistor includes a floating gate overlying the first OD region. A memory P well is disposed in the semiconductor substrate. A memory N well is disposed in the memory P well. The memory P well overlaps with the first OD region and the second OD region. The memory P well has a junction depth that is deeper than a trench depth of the isolation region. The memory N well has a junction depth that is shallower than the trench depth of the isolation region.
公开/授权文献
- US20160013199A1 HIGHLY SCALABLE SINGLE-POLY NON-VOLATILE MEMORY CELL 公开/授权日:2016-01-14
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