Invention Grant
- Patent Title: Magnetic field sensor
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Application No.: US14168095Application Date: 2014-01-30
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Publication No.: US09640753B2Publication Date: 2017-05-02
- Inventor: Jijun Sun , Phillip Mather , Srinivas Pietambaram , Jon Slaughter , Renu Whig , Nicholas Rizzo
- Applicant: EVERSPIN TECHNOLOGIES, INC.
- Applicant Address: US AZ Chandler
- Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee Address: US AZ Chandler
- Agency: Bookoff McAndrews, PLLC
- Main IPC: G01R33/06
- IPC: G01R33/06 ; H01L43/10 ; G01R33/09 ; H01L43/12

Abstract:
A sensor and fabrication process are provided for forming reference layers with substantially orthogonal magnetization directions having zero offset with a small compensation angle. An exemplary embodiment includes a sensor layer stack of a magnetoresistive thin-film based magnetic field sensor, the sensor layer stack comprising a pinning layer; a pinned layer including a layer of amorphous material over the pinning layer, and a first layer of crystalline material over the layer of amorphous material; a nonmagnetic coupling layer over the pinned layer; a fixed layer over the nonmagnetic coupling layer; a tunnel barrier over the fixed layer; and a sense layer over the nonmagnetic intermediate layer. Another embodiment includes a sensor layer stack where a pinned layer including two crystalline layers separated by a amorphous layer.
Public/Granted literature
- US20140159179A1 TWO-AXIS MAGNETIC FIELD SENSOR HAVING REDUCED COMPENSATION ANGLE FOR ZERO OFFSET Public/Granted day:2014-06-12
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