- 专利标题: Apparatus for coating substrates using the EB/PVD method
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申请号: US13642086申请日: 2011-04-20
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公开(公告)号: US09644259B2公开(公告)日: 2017-05-09
- 发明人: Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
- 申请人: Juergen Hotz , Pavel Seserko , Joerg Wittich , Helmut Eberhardt , Manfred Kirschner , Wolfgang Rieth
- 申请人地址: DE Hanau
- 专利权人: ALD Vacuum Technologies GmbH
- 当前专利权人: ALD Vacuum Technologies GmbH
- 当前专利权人地址: DE Hanau
- 代理机构: Crowell & Moring LLP
- 优先权: DE102010017895 20100421
- 国际申请: PCT/DE2011/000434 WO 20110420
- 国际公布: WO2011/131171 WO 20111027
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23C14/24 ; C23C14/30 ; H01J37/20 ; H01J37/305
摘要:
An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.
公开/授权文献
- US20130032092A1 APPARATUS FOR COATING SUBSTRATES USING THE EB/PVD METHOD 公开/授权日:2013-02-07
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