Invention Grant
- Patent Title: Tunable magnetic field to improve uniformity
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Application No.: US14829662Application Date: 2015-08-19
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Publication No.: US09646843B2Publication Date: 2017-05-09
- Inventor: Andrew Nguyen , Tza-Jing Gung , Haitao Wang , Maxim Mikhailovich Noginov , Reza Sadjadi , Chunlei Zhang , Xue Yang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/3065 ; C23C16/50 ; C23C16/455 ; C23C14/22 ; H01L21/02
Abstract:
Implementations described herein provide a magnetic ring which enables both lateral and azimuthal tuning of the plasma in a processing chamber. In one embodiment, the magnetic ring has a body. The body has a top surface and a bottom surface, and a plurality of magnets are disposed on the bottom surface of the body.
Public/Granted literature
- US20160163511A1 TUNABLE MAGNETIC FIELD TO IMPROVE UNIFORMITY Public/Granted day:2016-06-09
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