- 专利标题： Disk-brush cleaner module with fluid jet
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申请号： US12771969申请日： 2010-04-30
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公开(公告)号： US09646859B2公开(公告)日： 2017-05-09
- 发明人: Hui Chen , Allen L. D'Ambra , Sen-Hou Ko , Yufei Chen , Adrian Blank , Mario D. Silvetti , Gerald J. Alonzo , Lakshmanan Karuppiah
- 申请人： Hui Chen , Allen L. D'Ambra , Sen-Hou Ko , Yufei Chen , Adrian Blank , Mario D. Silvetti , Gerald J. Alonzo , Lakshmanan Karuppiah
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- 主分类号： H01L21/67
- IPC分类号： H01L21/67
摘要：
Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using a disk brush. One embodiment provides a substrate cleaner comprising a substrate chuck disposed in the processing volume, and a brush assembly disposed in the processing volume, wherein the brush assembly comprises a disk brush movably disposed opposing the substrate chuck, and a processing surface of the disk brush contacts a surface of the substrate on the substrate chuck.
公开/授权文献
- US20110265816A1 DISK-BRUSH CLEANER MODULE WITH FLUID JET 公开/授权日：2011-11-03
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