Invention Grant
- Patent Title: Isolation structure and method for fabricating the same
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Application No.: US14859348Application Date: 2015-09-20
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Publication No.: US09647060B2Publication Date: 2017-05-09
- Inventor: Shih-Yin Hsiao , Kuan-Liang Liu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Priority: TW104126006A 20150810
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/762

Abstract:
A method for fabricating isolation device is disclosed. The method includes the steps of: providing a substrate; forming a shallow trench isolation (STI) in the substrate, the STI includes a first STI and a second STI, and the first STI surrounds a first device region and the second STI surrounds a second device region; forming a first doped region between and contact the first STI and the second STI; and forming a first gate structure on the first doped region, the first STI and the second STI.
Public/Granted literature
- US20170047397A1 ISOLATION STRUCTURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-02-16
Information query
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