Invention Grant
- Patent Title: Target supply device
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Application No.: US15143066Application Date: 2016-04-29
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Publication No.: US09648715B2Publication Date: 2017-05-09
- Inventor: Yutaka Shiraishi , Toshiyuki Hirashita , Shinya Ikesaka
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.
Public/Granted literature
- US20160249443A1 TARGET SUPPLY DEVICE Public/Granted day:2016-08-25
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