Invention Grant
- Patent Title: Multiplex tunable filter spectrometer
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Application No.: US14518974Application Date: 2014-10-20
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Publication No.: US09651422B2Publication Date: 2017-05-16
- Inventor: Vidi A. Saptari
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Choate, Hall & Stewart LLP
- Agent William R. Haulbrook; Margo R. Monroe
- Main IPC: G01J3/45
- IPC: G01J3/45 ; G01J3/06 ; G01J3/32 ; G01N21/25 ; G01N21/31 ; G01J3/12 ; G01N21/33 ; G01N21/3504

Abstract:
The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.
Public/Granted literature
- US20150103354A1 MULTIPLEX TUNABLE FILTER SPECTROMETER Public/Granted day:2015-04-16
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